Photoresist
Coating
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The 400/600 Series are special for the spraycoating of a wide range of coatingmaterials
and substrates as Positiv- and Negativresist, Soldermask,Polyimid, ThickLayer
on Struktures with high circuits and applications of mikrosystems. Thick-
and ThinCoating of Photomaterial with high Viscosity.
ResistLayers up to a thickness of some 100µm can be applied with one coatingStep. So
the costs are reduced and the efficiency increased.
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Depending on substate-dimensions
and production-volume there are different machines
available:
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Laboratory equipment 400
LAB
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Typical application:
ResistCoating
on wafer, ceramics and sensors
operation area
( length x width) : approx. 2 x 1 m
you may connect
a continous drier optionally
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Produktion equipment
600 EB
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Typical
application:
Sodermask
on PCB´s
Length
of a complete line: approx. 4 m + length of the
drier
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